平板顯示器用靶材
Targets For Flat Panel Display
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材料(符號)
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純 度
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形 狀
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最大尺寸
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氧化鋅鋁(AZO)靶
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3N5
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平面靶
|
300x110mm
|
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氧化鈮(Nb2O5)靶
|
3N5
|
平面靶
|
300x110mm
|
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二氧化硅(SiO2)靶
|
4N
|
平面靶
|
1000x300mm
|
|
多晶硅(Si)靶
|
5N
|
平面靶
|
150x150mm
|
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鈮(Nb)靶
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3N
|
平面靶
|
1000x300mm
|
|
鈦(Ti)靶
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2N5/4N5
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平面靶
|
1500x300mm
|
|
鉬(Mo)靶
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3N5
|
平面靶
|
800x300mm
|
|
鉭(Ta)靶
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3N5
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平面靶
|
1000x300mm
|
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鉻(Cr)靶
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2N5/3N5
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平面靶
|
600x200mm
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鎳&鎳合金靶
|
3N
|
平面靶
|
1500x300mm
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鋁&鋁合金靶
|
4N/5N
|
平面靶
|
1500x300mm
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